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P‐185L: Late‐News Poster : Direct Patterning of Metal Electrodes for TFT‐LCD Fabrication
Author(s) -
Moon TaeHyoung,
Nam SeongHee,
Kim NamKook,
Kook YunHo,
Jung YoungKi,
Chang YounGyoung,
Yoo SoonSung,
Kim ChangDong,
Kang Inbyeong,
Chung InJae
Publication year - 2009
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3256550
Subject(s) - fabrication , liquid crystal display , electrode , materials science , thin film transistor , optoelectronics , transfer printing , screen printing , metal , nanotechnology , electrical engineering , metallurgy , composite material , engineering , chemistry , medicine , alternative medicine , pathology , layer (electronics)
We have analyzed a metal direct printing method using roll printing technology for the low cost process in TFT‐LCD fabrication. The silver metal electrodes patterned down to 3 μm in space width between lines were directly printed by this method. Very low line resistivity of 4.5 μΩ⋅cm was obtained, which is comparable to that of the AlNd metal alloy for the gate electrode of TFT‐LCD. Furthermore, we evaluated the transfer characteristics of an a‐Si:H TFT using directly printed silver material as a gate line.
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