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P‐62: Non‐Contact Motion of a Thin Glass Substrate over a Large Process Opening
Author(s) -
Nishri Boaz,
Brodetski Svetlana,
Harnik Arie,
Delorme Marc
Publication year - 2009
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3256543
Subject(s) - substrate (aquarium) , process (computing) , materials science , coating , nanotechnology , computer science , geology , oceanography , operating system
This paper highlights a novel processing technique for maintaining accurate LCD substrate positioning over a very large process opening in manufacturing processes such as metrology or accurate coating applications where non‐contact with the substrate is beneficial.
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