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P‐6: A Poly‐Si TFT Fabricated by a Novel Laser‐Crystallization Technique Using Blu‐Ray Disc Technology
Author(s) -
Machida Akio,
Fujino Toshio,
Kono Tadahiro,
Takagi Katsuji,
Haga Shinsuke,
Imanishi Shingo,
Kamei Takahiro
Publication year - 2009
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3256476
Subject(s) - servo , servomechanism , materials science , optics , focus (optics) , crystallization , thin film transistor , beam (structure) , optoelectronics , mechanical engineering , engineering , electrical engineering , physics , nanotechnology , layer (electronics) , chemical engineering
Using Blu‐ray disc technology in which the focus servo‐system and the energy servo‐system are mounted on one head, we can precisely control the scanning beam and thus the location of the grain boundaries generated by the scanning beam.