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7.3: Morphology Effect on Field Emission Property of Carbon Nanotube Emitters in Triode Structure
Author(s) -
Cheng HuiWen,
Yeh TaChing,
Kuo YiTing,
Li Yiming,
Lin ChenChun,
Pan FuMing,
Chiang MeiTsao,
Lo KuoChung,
Mo ChiNeng
Publication year - 2008
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3069754
Subject(s) - triode , materials science , field electron emission , carbon nanotube , nanotechnology , electric field , chemical vapor deposition , optoelectronics , electron , electrical engineering , voltage , physics , quantum mechanics , capacitor , engineering
In this work, process variation on the field emission property of the fabricated field emission (FE) triode arrays with carbon nanotubes (CNTs) as the field emitters are explored. To fabricate the FE triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition. The SiO 2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the FE area in the triode. We employ the finite difference time domain particle‐in‐cell method to calculate the structure FE property, where the results are calibrated with the collected FE current of the fabricated samples. The FE current of structure is then examined with respect to different shape, random height and angle of the CNT emitters. for symmetric shapes, like circle and square, the emission beam has been more focusing than triangle and trapezoid. The electric field of random height of CNTs is stronger than that of random angle. It is implied that the vertical CNTs has better FE property. Having the symmetric shape and vertical CNTs in triode structure benefits the FE sources for advanced flat display technologies.