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P‐147: Change of Secondary Electron Emission Properties with Micro‐Structural Evolution of MgO Film During Growth
Author(s) -
Yu Hak Ki,
Lee JongLam,
Park Eung Chul,
Kim Jae Sung,
Ryu Jae Hwa
Publication year - 2008
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3069516
Subject(s) - crystallite , materials science , secondary emission , oxygen , band gap , deposition (geology) , electron , analytical chemistry (journal) , chemistry , metallurgy , optoelectronics , paleontology , physics , organic chemistry , chromatography , quantum mechanics , sediment , biology
Abstract Preferred orientation of polycrystalline MgO film changed from (111) to (200) as the deposition rate reduced from 20Å/sec to 3Å/sec. The oxygen vacancies were easily produced at the surface of (200) plane due to low surface cohesive energy. These oxygen vacancies were acted as defect center in the band gap of MgO, resulting in the increase of secondary electron emission coefficient from 0.032 to 0.048.