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12.3: Defect Visualization of Atomic Layer Deposition Enabled Polymer Barriers Using Fluorescent Tags
Author(s) -
Zhang Yadong,
Miller David C.,
Bertrand Jacob A.,
Jen ShihHui,
Yang Ronggui,
Dunn Martin L.,
George Steven M.,
Lee Y. C.,
Zhang YuZhong
Publication year - 2008
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.3069422
Subject(s) - oled , materials science , polyethylene naphthalate , coating , atomic layer deposition , layer (electronics) , polymer , fluorescence , optoelectronics , nanometre , nanotechnology , deposition (geology) , composite material , optics , physics , paleontology , sediment , biology
Nanometer thick alumina barrier coatings deposited using atomic layer deposition (ALD) can be used to enable flexible packaging to protect organic light emitting diodes (OLED) and other electronic/optoelectronic components from moisture‐and oxygen‐aided deterioration. Individual defects and cracks generated in the coating during processing, subsequent handling and application, allow the leakage of reactive species that may lead to device degradation. Therefore, novel fluorescent tags have been developed to visualize defects and damage, enabling rapid quality inspection of barrier layers. for ALD alumina coatings deposited on polyethylene naphthalate (PEN) substrates, the fluorescent taggant identified cracks ∼20nm in width and individual defects as small as ∼200nm in diameter. This novel approach, which is non‐destructive and fully compatible with the optical inspection methods that are widely used in manufacturing, is expected to have a major impact on the quality control of flexible polymer packaging of OLED and other organic components or systems.