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P‐53: New TPS Function for Identifying Nano‐Scale Organic Film Phase in Large‐Size AMOLED Deposition Processes using Belt Source Evaporation Techniques
Author(s) -
Hwang Chang Hun,
Kim Yongki,
Lee Tae Hee,
Yu Sin Jae,
Kim Sung Su,
Kim Te Wan,
Ju SungHoo
Publication year - 2007
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2785313
Subject(s) - sublimation (psychology) , amoled , materials science , deposition (geology) , evaporation , nanotechnology , analytical chemistry (journal) , chemical engineering , chemistry , chromatography , layer (electronics) , geology , sediment , psychology , paleontology , active matrix , engineering , psychotherapist , thin film transistor , physics , thermodynamics
New TPS(Temperature Programmed Sublimation) technology has been developed in order to deploy to the belt source evaporation for large‐Size AMOLED deposition processes. When the organic film deposit on the metal plate, we have found it has nano‐scale film phase and bulk phase for the first time. The film phase of the Alq3 has 2,000Å for its saturated thickness and 155°C for its sublimation temperature. Also, there are no particles generated during plane source sublimation and TPS function as a powerful tool provides optimum thickness information for the AMOLED deposition processes.