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P‐197L: Late‐News Poster : Demonstration of High Performance TFTs on Silicon‐on‐Glass (SiOG) Substrate
Author(s) -
Manley Robert G.,
Fenger Germain,
Hirschman Karl D.,
Couillard J. Gregory,
Williams Carlo Kosik,
DawsonElli David,
Cites Jeffrey
Publication year - 2007
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2785286
Subject(s) - materials science , wafer , silicon on insulator , optoelectronics , substrate (aquarium) , fabrication , silicon , cmos , nanotechnology , medicine , oceanography , alternative medicine , pathology , geology
This report is an introduction to a new silicon‐on‐glass (SiOG) substrate and device technology. The fabrication and analysis of CMOS devices fabricated using SiOG are presented. The SiOG devices are comparable to those fabricated on SOI wafers with respect to carrier mobility and off‐state leakage current. This technology clearly demonstrates the potential for system‐on‐panel integration.