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Value‐added integration of functions for silicon‐on‐glass (SOG) based on LTPS technologies
Author(s) -
Nishibe Tohru,
Nakamura Hiroki
Publication year - 2007
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/1.2709736
Subject(s) - thin film transistor , materials science , substrate (aquarium) , silicon , polycrystalline silicon , key (lock) , electronic circuit , computer science , integrated circuit , optoelectronics , engineering physics , process engineering , nanotechnology , electrical engineering , engineering , oceanography , computer security , layer (electronics) , geology
— Low‐temperature polycrystalline‐silicon (LTPS) TFT‐LCDs are on their way to becoming advanced displays, which will lead to the use of system‐on‐glass (SOG) technology. Improvement in poly‐Si TFT performance is essential in order for them to become value‐added displays, where circuits for various functions are integrated onto the substrate. In this paper, the key processes of the applications for future displays will be described, including the recent development of SOG.