Premium
P‐75: Useful Inspection Method of Rubbed Polyimide Film with Optical Anisotropy using Reflection Ellipsometry
Author(s) -
Murai Hideyuki,
Ekawa Koichi,
Takashima Jun,
Naito Hitoshi,
Nakatsuka Nobuo
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433540
Subject(s) - ellipsometry , reflection (computer programming) , polyimide , anisotropy , materials science , optics , light reflection , optical anisotropy , optoelectronics , composite material , thin film , computer science , physics , nanotechnology , layer (electronics) , programming language
We have developed useful inspection method of rubbed Polyimide film with optical anisotropy using reflection ellipsometry and new reflection ellipsometer for in‐line, full inspection. We introduce the theory of the method and show experimental results of new reflection ellipsometer.