Premium
P‐67: Brief Study of an Electric Force on a Glass Substrate in a Dry Etching System
Author(s) -
Choe HeeHwan,
Jeon JaeHong,
Lee Kang Woong,
Seo Jong Hyun
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433529
Subject(s) - dry etching , substrate (aquarium) , etching (microfabrication) , fabrication , materials science , optoelectronics , nanotechnology , composite material , geology , medicine , oceanography , alternative medicine , layer (electronics) , pathology
Substrate holding systems are widely used in TFT fabrication. As a basic study of ESC system, we have investigated the electric force on a glass substrate in dry etching system. Brief calculation shows that there might be an upward electric force against the gravitational force. This electric force depends on dry etching system and process conditions.