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P‐66: Applying Vacuum Assembly to Improve the Uniformity of LCoS Substrates
Author(s) -
Huang LiChen,
Lo YuCheng,
Liu KuangHua,
Huang IChen,
Chuang ChiSen,
Wang JiunMing,
Liu ShengFa,
Mo ChiNeng,
Li HuaiAn
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433528
Subject(s) - substrate (aquarium) , materials science , liquid crystal on silicon , process (computing) , nanotechnology , optoelectronics , computer science , liquid crystal display , oceanography , geology , operating system
Assembly is the most critical process in LCoS manufacture and affects display performance. Vacuum assembly is used to improve traditional assembly method and prevent the pollution of environmental particles. We demonstrate that vacuum assembly can improve the cell gap uniformity up to ±0.1 μm of LCoS substrate.