P‐59: Aqueous‐Base‐Developable Benzocyclobutene (BCB)‐Based Material for Display Applications | Zendy

So YingHung | Zendy; Stark Edmund | Zendy; Li Yongfu | Zendy; Kisting Scott | Zendy; Achen Albert | Zendy; Baranek Kayla | Zendy; Scheck Dan | Zendy; Hetzner Jack | Zendy; Beach Elvin | Zendy; Folkenroth Jason | Zendy

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P‐59: Aqueous‐Base‐Developable Benzocyclobutene (BCB)‐Based Material for Display Applications

Author(s) -

So YingHung,

Stark Edmund,

Li Yongfu,

Kisting Scott,

Achen Albert,

Baranek Kayla,

Scheck Dan,

Hetzner Jack,

Beach Elvin,

Folkenroth Jason

Publication year - 2006

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1889/1.2433521

Subject(s) - benzocyclobutene , chemical mechanical planarization , materials science , microelectronics , layer (electronics) , dielectric , composite material , base (topology) , aqueous solution , optoelectronics , chemistry , mathematical analysis , mathematics

A self‐priming and photosensitive aqueous‐base‐developable benzocyclobutene (BCB)‐based dielectric material curable in air is described. Patterned films have high resolution. Whether cured in nitrogen or in air, the formulation produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as a planarization layer or insulation layer in display applications.

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