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P‐59: Aqueous‐Base‐Developable Benzocyclobutene (BCB)‐Based Material for Display Applications
Author(s) -
So YingHung,
Stark Edmund,
Li Yongfu,
Kisting Scott,
Achen Albert,
Baranek Kayla,
Scheck Dan,
Hetzner Jack,
Beach Elvin,
Folkenroth Jason
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433521
Subject(s) - benzocyclobutene , chemical mechanical planarization , materials science , microelectronics , layer (electronics) , dielectric , composite material , base (topology) , aqueous solution , optoelectronics , chemistry , mathematical analysis , mathematics
Abstract A self‐priming and photosensitive aqueous‐base‐developable benzocyclobutene (BCB)‐based dielectric material curable in air is described. Patterned films have high resolution. Whether cured in nitrogen or in air, the formulation produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as a planarization layer or insulation layer in display applications.