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P‐220L: Late‐News Poster : Layer‐Transfer of Silicon Single‐Crystal Films on Large‐Area Glass Substrates For Mobile Display Applications
Author(s) -
Sullivan Jim,
Kirk Harry R.,
Lamm Albert J.,
Kang Sien,
Ong Philip J.,
Henley Francois J.
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433478
Subject(s) - materials science , fabrication , silicon , substrate (aquarium) , layer (electronics) , optoelectronics , crystal (programming language) , transfer (computing) , nanotechnology , computer science , medicine , oceanography , alternative medicine , pathology , parallel computing , programming language , geology
The fabrication of multilayer single‐crystal on large‐area FPD glass was demonstrated for the first time using a film layer‐transfer method. Multiple substrate transfers were successfully made on FPD glass to release a 1000–4000 Angstrom film of single‐crystal silicon. Both electrostatic and plasma‐activated bonding was shown to be effective in achieving film transfer.