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71.2: Distinguished Paper : iMoD™ Display Manufacturing
Author(s) -
Floyd Philip D.,
Heald David,
Arbuckle Brian,
Lewis Alan,
Kothari Manish,
Gally Brian J.,
Cummings Bill,
Natarajan B. R.,
Palmateer Lauren,
Bos Jan,
Chang Daniel,
Chiang Jedi,
Chu Denny,
Wang LiMing,
Pao Edmon,
Su Fritz,
Huang Vincent,
Lin WenJian,
Tang WenChung,
Yeh JiaJiun,
Chan ChenChun,
Shu FangAnn,
Ju YuhDiing
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433440
Subject(s) - flat panel display , wafer , fabrication , process (computing) , wafer fabrication , microelectromechanical systems , engineering , computer science , electrical engineering , materials science , nanotechnology , medicine , alternative medicine , pathology , operating system
QUALCOMM has developed and transferred to manufacturing iMoD Displays, a MEMS‐based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales‐up to enable fabrication on flat‐panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.