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47.3: Plane Source and In‐Line Deposition System for OLED Manufacturing
Author(s) -
Hwang Changhun Chriss
Publication year - 2006
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2433296
Subject(s) - oled , tact , line (geometry) , evaporation , deposition (geology) , plane (geometry) , materials science , production line , optoelectronics , engineering , nanotechnology , mechanical engineering , physics , psychology , paleontology , geometry , mathematics , layer (electronics) , sediment , biology , psychotherapist , thermodynamics
Whether the manufacturing of the large‐size OLED devices succeeds or not will strongly depend on the concept of a thermal evaporation source. The most important factors in OLED device manufacturing are the organic material utilization and the TACT time. We propose an in‐line type equipment for OLED manufacturing using a novel plane evaporation source. The plane source maintains the organic film uniformity at 5% and provides high material utilization of over 60% and the proposed in‐line system can achieve in 1 min. TACT time.
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