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P‐42: Development of CNT Cathodes for Field‐Emission FPDs by Liquid‐Phase Fabrication
Author(s) -
Chen YaoZong,
Kuo ChihChe,
Cheng Kevin,
Fang JinShou,
Hsiao ChunYen,
Chang PuHsin,
Yang Frank,
Wu ChinHao,
Chan TeFong,
Gao Bo,
Oh Soojin,
Shimoda Hideo,
Zhou Otto
Publication year - 2005
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2036465
Subject(s) - materials science , field electron emission , photolithography , cathode , fabrication , triode , field emission display , deposition (geology) , nanotechnology , optoelectronics , substrate (aquarium) , carbon nanotube , polishing , composite material , voltage , electrical engineering , alternative medicine , oceanography , pathology , quantum mechanics , electron , medicine , physics , sediment , geology , engineering , biology , capacitor , paleontology
Fabrication of CNT pattern by liquid‐phase based deposition technique has been studied in Xintek for several years. By using this technique, we successfully fabricated sealed CNT field emission display prototypes with diode structures. The CNT panel size has been scaled up from 4 inch to 8 inch. Patterned CNT cathode was made by incorporating photolithography techniques into the liquid‐phase deposition process. CNT pattern size of 50 um was achieved on our standard (unpolished) display substrates. A simple substrate polishing process could reduce the CNT pattern size down to 20 um. It indicates that high‐resolution displays are possible by improving the surface smoothness of the substrates. The patterned CNT cathodes demonstrated good field emission characteristics including low turn‐on field and high emission current density. However, the emission uniformity remains to be a major concern. The global emission uniformity of the CNT panels can be improved through more engineering efforts. We believe that the emission uniformity in pixel can be enhanced by optimization of the liquid‐phase deposition process and CNTs concentration, distribution as well as morphology in the cathodes. Liquid‐phase deposition technique can also deposit CNTs into preformed triode structures with the aid of photolithography techniques.