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69.4: Invited Paper: Mass Production of Full‐Color AMOLED Displays
Author(s) -
Hamer J. W.,
Yamamoto A.,
Rajeswaran G.,
Slyke S. A.
Publication year - 2005
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2036392
Subject(s) - amoled , oled , materials science , computer science , active matrix , thin film transistor , nanotechnology , layer (electronics)
Mass production of full‐color active‐matrix OLED (AMOLED) displays began in October 2002 at SK Display Corporation. This milestone was achieved through an integration of modified low‐temperature polysilicon substrates (LTPS), manufacturing subsystems for the uniform deposition of OLED device structures, encapsulation subsystems with automated desiccant delivery, precision shadow masks for color pixel patterning, and the ability to meet product specifications. This paper discusses the advances made in process integration, reproducibility of display performance, productivity gains, and yield improvement. During two years of production experience, SK Display has made steady progress on its manufacturing learning curve and has already introduced second‐generation AMOLED production equipment for 335 × 550 mm glass substrates. The chosen OLED technologies are scaleable to larger glass substrate sizes compatible with existing LTPS facilities. Even though OLED deposition technologies have significantly matured in productivity, yield, and available capacity, substantial improvements in the quality of LTPS substrates suitable for OLEDs is necessary before AMOLEDs can become competitive with AMLCDs.