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69.1: Scanning Evaporation System with Multi Evaporation Sources for Manufacturing Large Size Full‐Color OLED Displays
Author(s) -
Murakami Masakazu,
Ohara Hiroki,
Ibe Takahiro,
Ikeda Hisao,
Hirakata Yoshiharu,
Yamazaki Shunpei
Publication year - 2005
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2036389
Subject(s) - evaporation , substrate (aquarium) , oled , materials science , full color , optoelectronics , nanotechnology , physics , geology , thermodynamics , oceanography , layer (electronics)
We have developed an evaporation system that can co‐evaporate up to four kinds of materials simultaneously and correspond to a large substrate by scanning it in x‐y directions under the substrate. This system has achieved not only the device with superior performance but also high accuracy of separate application of materials.