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63.2: New‐Generation Electro‐Optic Modulator for TFT Array Inspection
Author(s) -
Chen Xianhai
Publication year - 2005
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2036366
Subject(s) - thin film transistor , lamination , materials science , optoelectronics , sensitivity (control systems) , transistor , reliability (semiconductor) , coating , modulation (music) , optics , electronic engineering , electrical engineering , nanotechnology , engineering , acoustics , voltage , layer (electronics) , power (physics) , physics , quantum mechanics
A new generation of electro‐optic (EO) modulator has been developed for thin film transistor (TFT) array inspection with improved defect detection sensitivity and reliability. The new modulators are made of solvent‐based polymer dispersed liquid crystal (PDLC) and by a simple spin coating and a vacuum lamination process.