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53.1: Fabrication of CNT Emitter Array with Polymer Insulator
Author(s) -
Nishimura Kunihiko,
Hosono Akihiko,
Kawamoto Satoru,
Suzuki Yosuke,
Yasuda Naoki,
Nakata Shuhei,
Watanabe Shoyu,
Sawada Takao,
Abe Fumio,
Shiroishi Tetsuya,
Fujikawa Masahiro,
Shen Zhiyings,
Okuda Soichiro,
Hirokado Yoshinobu
Publication year - 2005
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.2036321
Subject(s) - insulator (electricity) , common emitter , outgassing , materials science , fabrication , dry etching , polymer , optoelectronics , carbon nanotube , etching (microfabrication) , nanotechnology , voltage , composite material , electrical engineering , chemistry , engineering , medicine , alternative medicine , organic chemistry , pathology , layer (electronics)
A new method of fabricating CNT emitter array using polymer insulator with low outgassing has been developed. A dry etching process without the damage on the CNT has been found and it proved to decrease the turn‐on voltage. Better emission properties than conventional insulator has been obtained.