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Applications of OLEDs that use VUV‐CVD films
Author(s) -
Toshikawa Kiyohiko,
Miyano Junichi,
Yokotani Atsushi,
Kurosawa Kou,
Matsumoto Yoshiie
Publication year - 2005
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/1.1927739
Subject(s) - materials science , oled , optoelectronics , computer science , nanotechnology , layer (electronics)
— In photo‐CVD (chemical vapor deposition) in which vacuum‐ultraviolet (VUV) excimer lamps (VUV‐CVD) are used, thin films were deposited at room temperature because VUV photons have the energy to decompose material gases. For the use of OMCTS (octamethylcyclotetrasiloxane), an organic siloxane, we can deposit a self‐flatness film for high‐pressure conditions. The reactants generated by VUV photons have excellent migration characteristics for this condition. Also, the VUV‐CVD film demonstrates low stress, comparatively hard hardness, good electrical properties, and good thermal resistance. The VUV‐CVD film is optimum for planarizing film in the over‐coating deposition step in the production of OLEDs, which requires a low‐temperature process.