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Display thin‐film coatings produced by ion‐beam processing
Author(s) -
Shiripov V.,
Khokhlov A.,
Maryshev S.,
Levchuk M.,
Khissamov A.,
Krivetski K.
Publication year - 2005
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/1.1904933
Subject(s) - thin film , materials science , ion beam , coating , sputtering , optoelectronics , beam (structure) , optics , flat panel display , ion , computer science , nanotechnology , physics , quantum mechanics
Abstract— Thin films are one of the most important components in present‐day displays. In this paper, new developments in the field of thin‐film coating technology and techniques for display applications will be discussed. These are based on the use of powerful ion‐beam flows. Scanning linear sputtering systems have made it feasible to achieve uniform coating over large areas in a wide spectrum of coats. Examples of multilayer coatings to be used in the display‐based equipment obtained through the use of ion‐beam technology will be presented.