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44.2: Novel Fabrication of Inorganic Color Filter Using Transmittance of Thin‐Film Layers
Author(s) -
Kim S. M.,
Kim J. H.,
Soh H. S.
Publication year - 1999
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1834179
Subject(s) - materials science , color gel , transmittance , optoelectronics , layer (electronics) , amorphous silicon , interference filter , filter (signal processing) , silicon nitride , amorphous solid , thin film , optics , silicon , thin film transistor , crystalline silicon , nanotechnology , wavelength , chemistry , crystallography , computer science , physics , computer vision
A novel inorganic color filter (ICF) for the reflective liquid crystal display (LCD) has been proposed and fabricated for red color filter. The optical interference film of only 3‐layer consists of thin films of Iridium Tin Oxide (ITO), silicon nitride (SiN x ) as transmittance layer and hydrogenated amorphous silicon (a‐Si:H) as an absorption layer. There was no color shift as defined value less than 3.0 of ΔE*ab for the ICF in the viewing angle up to 30 degrees.