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Low Temperature Flat Panel Display Driver Circuits in RTP Crystallized Polysilicon
Author(s) -
Stewart Mark,
Afentakis Themis,
Sarcona Greg,
Hatalis Miltiadis K.
Publication year - 1999
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1834056
Subject(s) - materials science , polysilicon depletion effect , electronic circuit , flat panel , amplifier , optoelectronics , flat panel display , silicon , amorphous solid , annealing (glass) , electrical engineering , electronic engineering , computer science , cmos , engineering , computer graphics (images) , transistor , composite material , voltage , chemistry , organic chemistry , gate oxide
The crystallization of amorphous silicon by rapid thermal processing has some important advantages over other techniques such as laser annealing. This work investigates the characteristics of low temperature polysilicon flat panel display driver circuits fabricated in RTP crystallized polysilicon. Both digital (shift register) and analog (operational amplifier) circuits are presented.