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21.4: Study on the Thermal Shrinkage of Annealed Corning Code 1737 Glass for Low‐Temperature Poly‐Si Application
Author(s) -
Mori K.,
Anma A.
Publication year - 1999
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1834019
Subject(s) - shrinkage , materials science , fabrication , thermal , composite material , annealing (glass) , thermodynamics , medicine , alternative medicine , physics , pathology
Thermal shrinkage of annealed Corning 1737 glass was measured following simulated thermal cycles for low temperature poly‐Si fabrication. If process temperature is reduced from 600 to 550°C, thermal shrinkage decreases by more than 50%. Reduction of process temperature as well as cycle time have a large impact on reducing thermal shrinkage.