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Effect of N‐Doped Hydrogen‐Free DLC Coating on Mo‐Tip FEAs
Author(s) -
Kim Hoon,
Jung Jae Hoon,
Ju Byeong Kwon,
Chung Suk Jae,
Jang Jin,
Oh Myung Hwan
Publication year - 1998
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1833828
Subject(s) - materials science , field electron emission , diamond like carbon , coating , work function , hydrogen , chemical vapor deposition , plasma enhanced chemical vapor deposition , doping , layer (electronics) , analytical chemistry (journal) , optoelectronics , nanotechnology , electron , thin film , chemistry , physics , organic chemistry , quantum mechanics , chromatography
Nitrogen gas phase doped diamond‐like carbon (DLC) coating on molybdenum‐tip field emitter arrays (FEAs) has been used to improve electron emission characteristics. The conventional plasma enhanced chemical vapor deposition (PECVD) method using a layer‐by‐layer technique was applied to deposit N‐doped hydrogen‐free DLC films. Electron emission characteristics were measured and possibility of applying this type of emitters to high frequency field emission displays (FEDs) was reported. The turn‐on voltage of Mo‐tip FEAs was decreased from 75V to 55V by DLC coating and emission current was more stable than that of conventional Mo‐tip FEAs. The transconductance of Mo‐tip FEAs was increased by N‐doped hydrogen‐free DLC coating with lowering effective work function of emitters.