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Surface Profiler for 1100mm Flat Panels, Dektak OSP1100 Overhead Scanning Stylus Profiler
Author(s) -
Naumann Walter,
Bland Loren,
Cunningham Tim,
Grossman Jeff
Publication year - 1998
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1833804
Subject(s) - stylus , repeatability , footprint , sample (material) , head (geology) , computer science , computer vision , geography , mathematics , geology , physics , statistics , archaeology , geomorphology , thermodynamics
A generation of large area flat panel stylus profilers is being built using a new approach to positioning and moving the measurement head over the sample. This approach has several advantages to FPD Manufacturers, including reduced footprint, lower measurement noise, and superior positioning repeatability.