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LP‐A: Late‐News Poster: A Low‐Temperature Poly‐Si TFT Reflective XGA Array for LCPC Light Valve
Author(s) -
Kunigita M.,
Kato N.,
Masumo K.,
Yuki M.
Publication year - 1998
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1833792
Subject(s) - materials science , thin film transistor , chemical mechanical planarization , optoelectronics , transistor , annealing (glass) , optics , layer (electronics) , electrode , oled , composite material , electrical engineering , chemistry , engineering , voltage , physics
A 2 inches in diagonal low temperature poly‐Si TFT reflective XGA array with driver integration was fabricated by Ar+ laser annealing method. An opaque organic film was used for a planarization layer of reflective electrodes as well as a light shield layer to the array. We applied the array to LCPC (Liquid Crystal / Polymer Composite) light valve and obtained a high resolution image.