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25.1: Similarities between TFT Arrays for Direct‐Conversion X‐Ray Sensors and High‐Aperture AMLCDS
Author(s) -
Boer W.,
Aggas S.,
Gu T.,
Byun Y. H.,
Qiu C.B.,
Thomsen S. V.
Publication year - 1998
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1833769
Subject(s) - thin film transistor , fabrication , aperture (computer memory) , dielectric , pixel , optoelectronics , materials science , optics , computer science , physics , nanotechnology , acoustics , medicine , alternative medicine , pathology , layer (electronics)
The fabrication and operation of a 14 in. × 8.5 in. TFT array for Direct Conversion X‐ray sensors with 1536 by 2560 pixels is described. Similarities in process and design are discussed with TFT arrays for high aperture AMLCDS, that also use a low k inter‐level dielectric to improve performance.