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42.1: High‐Rate Deposition of Clear and Hard Oxide Coatings on Plastic Films and Sheets
Author(s) -
Fahland M.,
Morgner H.,
Schiller N.,
Mutialu S.,
Bunshah R.
Publication year - 1998
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1833677
Subject(s) - abrasion (mechanical) , materials science , polycarbonate , deposition (geology) , coating , oxide , cathode , layer (electronics) , composite material , float glass , metallurgy , engineering , electrical engineering , paleontology , sediment , biology
Display technology is a rapidly growing market. Manufacturers of flat panel displays are urged to reduce their manufacturing costs to be competitive on the market. The growing application of plastic sheets and plastic films in display manufacturing requires a hard coating for enhancing the abrasion resistance or for serving as a basic layer for optical coatings. Oxide layers excel in high hardness and abrasion resistance. Utilizing the unique new Hollow cathode Activated Deposition (HAD) technology developed at FEP, allows tQ obtain oxide layers of optical clarity at very high deposition rates (100…500 nm/s) on large substrates. These high rates give the opportunity of economical deposition of thick oxide layers for displays. This new technological breakthrough will allow to fabricate larger flat panels with less weight and to increase the design capabilities of display manufacturers. As an example, this technology allows to provide polycarbonate with an abrasion resistance equal to that of normal float glass. This paper will address the new Hollow cathode Activated Deposition (HAD) technology to display manufacturers.