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36.5L: Late‐News Paper: Inorganic TDEL Display using SrS:Cu Blue‐Emitting Phosphor
Author(s) -
Mitsuhashi E.,
Yano Y.,
Susukida M.,
Hirabayashi J.,
Tuenge R.,
Dickey E.
Publication year - 2004
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1833130
Subject(s) - phosphor , materials science , layer (electronics) , optoelectronics , atomic layer deposition , diffusion barrier , sputtering , substrate (aquarium) , nanotechnology , thin film , oceanography , geology
Abstract Filtered inorganic TDEL displays with 5.7″diagonal QVGA using SrS:Cu as blue‐phosphor and stacked ZnS:Mn/ZnS:Tb Layers as Red/Green phosphors have been developed. Atomic Layer Deposition(ALD)‐Barrier layer and optimization of post anneal processing were used to improve SrS:Cu blue‐emitting phosphor performance as an oxygen diffusion barrier layer from the thick dielectric substrate. The use of simple stable phosphor materials enables an easily controllable and reproducible sputter processing impacting mass production for commercial small graphic displays.