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52.5L: Late‐News Paper : Versatile Evaporation Source for Large OLED Panel Manufacturing
Author(s) -
Shibata M.,
Klein D.,
Hartmann R.,
Chow P. P.
Publication year - 2003
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1832553
Subject(s) - oled , scalability , modular design , evaporation , injector , flux (metallurgy) , deposition (geology) , materials science , manifold (fluid mechanics) , computer science , mechanical engineering , optoelectronics , automotive engineering , process engineering , engineering , physics , nanotechnology , layer (electronics) , operating system , geology , paleontology , sediment , metallurgy , thermodynamics
We have developed an innovative and scalable evaporation source with a multi‐apertured injector manifold for uniform OLED material production over large area, non‐rotating panels. The source is integrated with optical monitoring for high precision and instantaneous flux adjustment using a valving mechanism. The modular design allows flexible deposition configurations.