52.5L:  Late‐News Paper : Versatile Evaporation Source for Large OLED Panel Manufacturing | Zendy

Shibata M. | Zendy; Klein D. | Zendy; Hartmann R. | Zendy; Chow P. P. | Zendy

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52.5L: Late‐News Paper : Versatile Evaporation Source for Large OLED Panel Manufacturing

Author(s) -

Shibata M.,

Klein D.,

Hartmann R.,

Chow P. P.

Publication year - 2003

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1889/1.1832553

Subject(s) - oled , scalability , modular design , evaporation , injector , flux (metallurgy) , deposition (geology) , materials science , manifold (fluid mechanics) , computer science , mechanical engineering , optoelectronics , automotive engineering , process engineering , engineering , physics , nanotechnology , layer (electronics) , operating system , geology , paleontology , sediment , metallurgy , thermodynamics

We have developed an innovative and scalable evaporation source with a multi‐apertured injector manifold for uniform OLED material production over large area, non‐rotating panels. The source is integrated with optical monitoring for high precision and instantaneous flux adjustment using a valving mechanism. The modular design allows flexible deposition configurations.

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