Premium
52.3: Invited Paper: OLED Manufacturing by Organic Vapor Phase Deposition
Author(s) -
Schwambera Markus,
Meyer Nico,
Gersdorff Markus,
Reinhold Markus,
Strauch Gerd,
Beccard Rainer,
Heuken Michael
Publication year - 2003
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1832551
Subject(s) - oled , scalability , deposition (geology) , scaling , process engineering , chemical vapor deposition , computer science , materials science , phase (matter) , production (economics) , nanotechnology , engineering , chemistry , organic chemistry , database , geology , paleontology , geometry , mathematics , layer (electronics) , sediment , economics , macroeconomics
The current status of the development of Organic Vapor Phase Deposition technology (OVPD) for the manufacturing of OLEDs will be reviewed. The basic OVPD principle is explained and typical performance data will be presented. Starting from a small scale R&D setup, the development of larger OVPD systems up to the first mass production unit is described. Special emphasis is put on the scalability of the process. The successful up‐scaling of the OVPD principle is supported by extensive numerical modeling that is also described.