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52.1: OLED Manufacturing Using Vertical In‐Line Machine Concept
Author(s) -
Hoffmann U.,
Netuschil P.,
Bender M.,
Sauer P.,
Schreil M.,
Amelung J.,
Leo K.
Publication year - 2003
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1832549
Subject(s) - oled , deposition (geology) , line (geometry) , evaporation , materials science , optoelectronics , diode , production line , computer science , mechanical engineering , composite material , engineering , physics , geology , mathematics , geometry , thermodynamics , paleontology , layer (electronics) , sediment
We present the results of the first vertical In‐Line Organic Light Emitting Diode (OLED) manufacturing machine (VES 400) equipped with linear etch and linear evaporation sources for organic materials as well as metals. The deposition height of 400 mm and the deposition width of > 470 mm fit to generation 2 or even larger substrates.