Premium
23.2: Effects of Evaporation Conditions on the Properties of MgO Thin Film as Protecting Material
Author(s) -
Hirakawa Takayoshi,
Goto Sadahiro,
Zhang Shuxiu,
Uchiike Heiju
Publication year - 2003
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1832415
Subject(s) - cathodoluminescence , evaporation , electron beam physical vapor deposition , magnesium , thin film , materials science , quadrupole mass analyzer , analytical chemistry (journal) , oxide , diffraction , quadrupole , mass spectrometry , chemistry , optics , metallurgy , atomic physics , nanotechnology , optoelectronics , physics , chromatography , luminescence , thermodynamics
Magnesium oxide (MgO) thin films are analyzed by X‐ray diffraction (XRD) from the structural point of view and measured cathodoluminescence spectra from the electron‐state characteristic point of view. The evaporation phenomena of MgO heated by electron beam are studied by the results of quadrupole mass spectrometer (QMS). We had very interesting information about the phases of MgO being evaporated from its surface.