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P‐15: LCoS based Projection Systems for Optical Metrology
Author(s) -
Riehemann Stefan,
Palme Martin,
Kuehmstedt Peter,
Notni Gunther
Publication year - 2003
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1832251
Subject(s) - metrology , liquid crystal on silicon , projection (relational algebra) , optics , computer science , light emitting diode , materials science , physics , algorithm , liquid crystal
Specially designed optical systems for optical metrology are presented in which LCoS‐displays are used for different front projection applications. Unusual projection geometries like spheres are covered as well as special light sources like ultra bright LEDs. Three different devices, which were realized for industrial and medical customers, are outlined.