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26.3: Investigation of the Bow of Silicon Backplanes for Microdisplay Applications
Author(s) -
Bodammer Georg,
Calton David W.,
Underwood Ian
Publication year - 2001
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1831890
Subject(s) - backplane , silicon , materials science , optoelectronics , cmos , silicon chip , electrical engineering , engineering
The optical performance of ferroelectric liquid crystal over silicon (FLCOS) microdisplay devices can be greatly improved by ensuring that the silicon backplane that forms the core of the display engine is both smooth and flat. In this paper we investigate the effect of the circuit design and manufacturing process on the bow of the silicon CMOS drive circuitry.