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14.2: Novel Device Structure of MIM Cathode Array for Field Emission Displays
Author(s) -
Sagawa M.,
Kusunoki T.,
Suzuki M.,
Tsuji K.
Publication year - 2001
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1831829
Subject(s) - cathode , passivation , materials science , field electron emission , optoelectronics , current density , electrode , layer (electronics) , pixel , field emission display , electrical engineering , nanotechnology , optics , engineering , chemistry , anode , physics , electron , quantum mechanics
A new device structure of an MIM‐cathode array with the passivation layer has been developed for FED. This design makes possible self‐patterning of the top electrode. As the results, high emission current density of 80mA/cm2 was successfully obtained in the 1.5′(3.8‐cm)‐diameter, 60 × 60 pixels cathode array.