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P‐56: Line Profile Measurement on LCD Substrates by Diffraction from Periodic Structure
Author(s) -
Okabe Hiroshi,
Fukui Hiroshi,
Furusawa Hirokazu,
Honjo Takuya,
Naito Hitoshi
Publication year - 2004
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1831013
Subject(s) - diffraction , line (geometry) , liquid crystal display , optics , materials science , substrate (aquarium) , measure (data warehouse) , optoelectronics , physics , computer science , geology , geometry , mathematics , oceanography , database
Abstract We developed a line profile sensor on LCD substrate using the diffraction properties of electromagnetic waves. The sensor can measure the line width and height simultaneously with less than several seconds. The small size of 200mm(W) × 150mm(D) × 250mm(H) makes in‐line installation easy. We analyzed the diffracted beams from LCD substrates, and derived the line profiles experimentally.