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27.3: New In‐Line Machine Concept for OLED Manufacturing
Author(s) -
Hoffmann U.,
Netuschil P.,
Sauer P.,
Lotz H.G.,
Klöppel A.,
Bender M.,
Trube J.
Publication year - 2002
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1830926
Subject(s) - oled , production line , evaporation , line (geometry) , diode , optoelectronics , materials science , production (economics) , sputtering , computer science , process engineering , engineering physics , mechanical engineering , nanotechnology , engineering , physics , thin film , mathematics , geometry , macroeconomics , layer (electronics) , economics , thermodynamics
A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We present the concept of a vertical In‐Line machine equipped with linear etch and linear evaporation sources for organic materials(small molecules) and sputter as well as evaporation sources for metals and ITO.