27.3: New In‐Line Machine Concept for OLED Manufacturing | Zendy

Hoffmann U. | Zendy; Netuschil P. | Zendy; Sauer P. | Zendy; Lotz H.G. | Zendy; Klöppel A. | Zendy; Bender M. | Zendy; Trube J. | Zendy

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27.3: New In‐Line Machine Concept for OLED Manufacturing

Author(s) -

Hoffmann U.,

Netuschil P.,

Sauer P.,

Lotz H.G.,

Klöppel A.,

Bender M.,

Trube J.

Publication year - 2002

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1889/1.1830926

Subject(s) - oled , production line , evaporation , line (geometry) , diode , optoelectronics , materials science , production (economics) , sputtering , computer science , process engineering , engineering physics , mechanical engineering , nanotechnology , engineering , physics , thin film , mathematics , geometry , macroeconomics , layer (electronics) , economics , thermodynamics

A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We present the concept of a vertical In‐Line machine equipped with linear etch and linear evaporation sources for organic materials(small molecules) and sputter as well as evaporation sources for metals and ITO.

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