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Thin‐film micromirror array (TMA) for large information‐display systems
Author(s) -
Kim SangGook,
Hwang KyuHo
Publication year - 2000
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/1.1828714
Subject(s) - video graphics array , projector , materials science , spatial light modulator , microelectromechanical systems , digital micromirror device , actuator , optoelectronics , scanner , large format , display device , optics , digital light processing , dot pitch , computer science , computer hardware , pixel , cmos , nanotechnology , physics , artificial intelligence , operating system
— The thin‐film micromirror array (TMA) is a new reflective‐type spatial light modulator fabricated with microelectromechanical systems (MEMS) technology. Micromachined thin‐film piezoelectric actuators are used to control the tilt angle of each micromirror, which defines the gray scale of the matching screen pixel. A working projector prototype of 5400 true ANSI lumens was presented at Asian Display '98 with three VGA‐format TMAchips and a 1‐kW xenon lamp. The prototype showed a light‐transmitting efficiency of 22%. An XGA‐format TMA was developed for commercial purposes. The size of each micromirror of the XGA‐format TMA is reduced to half the size of the micromirror of a VGA‐format TMA. Efforts have been made to maintain the light‐transmitting efficiency of the XGA TMA projector over 21%, as well as to improve the uniformity.