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Photoluminescent ZnS:Cu phosphor films made with atomic‐layer chemical vapor deposition and thermal evaporation
Author(s) -
Hikavyy A.,
Neyts K.,
Stuyven G.,
Poelman D.,
Visschere P.
Publication year - 2002
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/1.1827876
Subject(s) - photoluminescence , chemical vapor deposition , phosphor , materials science , atomic layer deposition , evaporation , layer (electronics) , deposition (geology) , thin film , chemical engineering , combustion chemical vapor deposition , electron beam physical vapor deposition , optoelectronics , analytical chemistry (journal) , nanotechnology , carbon film , chemistry , environmental chemistry , geology , paleontology , sediment , engineering , thermodynamics , physics
— Photoluminescent (PL) ZnS:Cu thin films were prepared by atomic‐layer chemical vapor deposition (ALCVD) and by thermal evaporation. The deposition, structure, and PL properties of the films were investigated, as well as the effect of heat treatment on photoluminescence.