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24.2: New Consideration to Annealing Process of Vacuum‐Evaporated MgO Thin Films by Cathodoluminescence Analysis
Author(s) -
Hirakawa Takayoshi,
Uchiike Heiju
Publication year - 2004
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1821413
Subject(s) - cathodoluminescence , annealing (glass) , materials science , magnesium , strontium oxide , oxide , vacuum evaporation , thin film , chemical engineering , metallurgy , analytical chemistry (journal) , optoelectronics , nanotechnology , chemistry , luminescence , chromatography , engineering
In order to clarify the heat treatment process for Magnesium Oxide (MgO), cathodoluminescent (CL) analysis was performed. Our results in the present work prove that the heat treatment has effects on not only removing water from the surface of MgO, but also increasing density of O and Mg defect pairs. It is the first work that the influence of heat treatment process on physical properties of the vacuum evaporated MgO thin films by CL analysis.