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56.2: Contactless LCD Fab: From Technology to Implementation
Author(s) -
Adin R.,
Yassour Y.
Publication year - 2004
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1821365
Subject(s) - nozzle , float glass , float (project management) , liquid crystal display , automation , process (computing) , process engineering , engineering , automotive engineering , mechanical engineering , manufacturing engineering , computer science , materials science , systems engineering , operating system , composite material
Contact of the LCD glass substrates, during the manufacturing process, with conveyers, supporting pins and vacuum chucks, is a common creator of defects. These include micro and macro defects in the form of scratches, particles, chemical residues, electro‐static discharge (ESD), temperature gradients and more. The frequency and severity of these defects rise as the glass size and display size grow. The Smart Nozzle Air Float technology has been developed by CoreFlow Scientific Solutions Ltd. to provide non‐contact handling of the glasses throughout the fab. This includes high performance accurate non‐contact platforms for process systems, and cost effective and reliable non‐contact transportation and automation equipment. Moreover, the Smart Nozzle Air Float technology enables new options for non‐contact glass handling solutions (vertical & horizontal) allowing new concepts of system design, also improving: footprint, throughput or other equipment attributes. The Smart Nozzle Air Float technology has been successfully implemented in several applications, some of them already operational at manufacturing fabs of major LCD makers.