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50.2: OLED Mass Production Deposition Equipment Using Downward Organic and Metal Deposition Method
Author(s) -
Choi D. K.,
Lee J. H.,
Kang C. G.,
Kim C. W.,
Kim D. S.,
Bae K. B.
Publication year - 2004
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1821352
Subject(s) - oled , deposition (geology) , crucible (geodemography) , vacuum deposition , materials science , evaporation , vacuum evaporation , decomposition , process (computing) , optoelectronics , process engineering , metallurgy , composite material , computer science , nanotechnology , thin film , engineering , chemistry , physics , geology , paleontology , computational chemistry , organic chemistry , layer (electronics) , sediment , thermodynamics , operating system
Until now, conventional vacuum thermal deposition system of which evaporation source is point source has many critical troubles like unstable deposition rate control, the defective design and material of crucible, organic material decomposition and discoloration, very low material utilization usage, and difficulty to large size glass processing due to glass/mask sagging. So, ANS has developed downward OLED deposition equipment (DSP, Digital Scanning Process) to overcome the troubles mentioned above. The process result of our equipment will be discussed below.