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3.3: Display Driver Circuits Fabricated on Flexible Stainless Steel Foils
Author(s) -
Afentakis Themistokles,
Hatalis Miltiadis,
Voutsas Apostolos,
Hartzell John
Publication year - 2004
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1889/1.1811445
Subject(s) - materials science , fabrication , electronic circuit , transistor , inverter , active matrix , optoelectronics , cmos , realization (probability) , substrate (aquarium) , voltage , polycrystalline silicon , shift register , thin film transistor , process (computing) , electrical engineering , electronic engineering , computer science , engineering , nanotechnology , medicine , statistics , alternative medicine , mathematics , oceanography , pathology , layer (electronics) , geology , operating system
Abstract This paper discusses the design and fabrication of digital circuits (primarily shift registers) for display and other active‐matrix driving applications on flexible substrates. The unique advantages of the substrate material and their relation to circuit performance are indicated. A high temperature fabrication process for laser annealed polycrystalline silicon MOS transistors on stainless steel foils is outlined, resulting in effective mobility values up to 267cm 2 /Vs for n‐channel and 88cm 2 /Vs for p‐channel devices. Transistor CMOS inverters with a minimum propagation delay of 1.02ns per inverter stage are reported. Both static and dynamic register designs with a high degree of integration are reported, having maximum operating frequencies up to 1.5MHz and 2.5MHz respectively, at supply voltages of 10V or less. These results constitute the first realization of this level of performance and complexity on flexible substrates, and demonstrate the feasibility of high‐speed digital circuitry on thin foils suited for ‐ but not limited to‐ active matrix array driving.