Open AccessStructural and morphological properties of contacts to a (111) orientation monosilicon substrate based on aluminum with a Ti and w – 10 % Ti barrier layer
Author(s) -
Yuri P. Snitovsky
Publication year - 2022
Publication title -
vestnik ûgorskogo gosudarstvennogo universiteta
Language(s) - English
Resource type - Journals
eISSN - 2078-9114
pISSN - 1816-9228
DOI - 10.18822/byusu20220236-57
Subject(s) - materials science , layer (electronics) , titanium , ohmic contact , aluminium , barrier layer , silicon , substrate (aquarium) , tungsten , impurity , phase (matter) , deposition (geology) , composite material , metallurgy , chemistry , paleontology , oceanography , organic chemistry , sediment , biology , geology