Open AccessEffect of magnetic field on plasma characteristics in magnetron discharge with hollow cathode
Author(s) -
S.V. Klad’ko,
Н. П. Полуэктов,
И. И. Усатов
Publication year - 2021
Publication title -
lesnoj vestnik
Language(s) - English
Resource type - Journals
ISSN - 2542-1468
DOI - 10.18698/2542-1468-2021-5-125-130
Subject(s) - magnetic field , plasma , electromagnet , cathode , cavity magnetron , magnet , materials science , field (mathematics) , condensed matter physics , atomic physics , nuclear magnetic resonance , physics , electrical engineering , engineering , thin film , nuclear physics , nanotechnology , sputtering , mathematics , quantum mechanics , pure mathematics
The effect of magnetic field on plasma characteristics in a magnetron with a hollow cathode was carried out. The magnetic field in this device is of complex geometry, since it consists of many permanent magnets and an electromagnet. The calculated geometries of the magnetic field were used in experimental studies. Measurements have shown that the magnitude and geometry of the magnetic field have a strong effect on the plasma parameters.