Open AccessComposition and Application of Micro-Electro-Mechanical Systems (MEMS)
Author(s) -
Indrit Vozga,
Jorgaq Kaçani
Publication year - 2017
Publication title -
materials
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.682
H-Index - 111
ISSN - 1996-1944
DOI - 10.18690/978-961-286-056-1.13
Subject(s) - physics , humanities , art